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VUVX2010 is the first conference following a merger of two long standing conference series – the International Conference on Vacuum Ultraviolet Radiation Physics (last meeting was the 15th in that series, VUV-15 in Berlin, Germany in July 2007) and the International Conference on X-ray and Inner-shell Processes (last meeting was the 21st in that series, X-08 held in Paris in June 2008).
An updated history of the merged series is in draft form.

Prior meetings:
International Conference on the Physics of X-Ray Spectra (1965 – 1976)
- Physics of X-Ray Spectra (1a), Ithaca, 1965
- X-ray Spectra and Chemical Binding (1b), Leipzig, East Germany, 1965
- X-ray Spectra and Electronic Structure of Matter (2), Kiev, 1968
- Processus Electroniques Simple et Multiples du Domaine X et XUV (3), Paris, 1970
- X-ray Spectra and Electronic Structure of Matter (4), Munich, 1972
- X-ray Processes in Matter (5), Otaniemi, Finland, 1974
- The Physics of X-Ray Spectra (6), Gaithersburg, 1976
Inner Shell Ionization Series (1972 – 1976)
- International Conference on Inner-Shell Ionization Phenomena and Future Applications (1), Atlanta, 1972
- Second International Conference on Inner-Shell Ionization Phenomena, Freiburg, 1976
X-ray Physics Series (1978 – 2008)
- 1978, X-ray and XUV Spectroscopy, Sendai, Japan (10th International Conference)
- 1980, X-ray Processes and Inner-shell Ionization, Stirling, Scotland (11th International Conference)
- 1982, X-82, X-ray and Inner Shell Physics, Eugene, USA (12th International Conference)
- 1984, X-84, X-ray and Inner Shell Processes in Atoms, Molecules and Solids, Leipzig, Germany (13th International Conference)
- 1987, X-87, X-ray and Inner Shell Processes, Paris, France (14th International Conference)
- 1990, X-90, X-ray and Inner Shell Processes, Knoxville, USA (15th International Conference)
- 1993, X-93, Debrecen, Hungary (16th International Confernece)
- 1996, X-96, Hamburg, Germany (17th international conference)
- 1999, X-99, Chicago, USA (18th International Conference)
- 2002, X-02, Rome, Italy (19th International Conference)
- 2005, X-05, Melbourne, Australia (20th International Conference)
- 2008, X-08, Paris, France (21st International Conference)
Vacuum Ultraviolet Radiation Physics Series (1962 – 2007)
- 1962 VUV-01 Los Angeles, USA
- 1968 VUV-02 Gatlinberg, Tennessee, USA
- 1971 VUV-03 Tokyo, Japan
- 1974 VUV-04 Hamburg, Germany
- 1977 VUV-05 Montpellier, France
- 1980 VUV-06 Charlottesville, USA
- 1983 VUV-07 Jerusalem, Israel
- 1986 VUV-08 Lund, Sweden
- 1989 VUV-09 Honolulu, USA
- 1992 VUV-10 Paris, France
- 1995 VUV-11 Tokyo, Japan
- 1998 VUV-12 San Francisco, USA
- 2001 VUV-13 Trieste, Italy
- 2004 VUV-14 Cairns, Australia
- 2007 VUV-15 Berlin, Germany
International Conference on Vacuum Ultraviolet and X-ray Radiation Physics (2010 - )
- 2010 VUVX2010 Vancouver, Canada
- 2013 to be determined
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